Fabrication method of new stamps with various pattern shapes or dimensions using one stamp

摘要

PURPOSE: A method for making stamps with changed pattern and size by using another stamp is provided to manufacture new size and patterns of a stamp by varying a line width of a pattern without complex lithography. CONSTITUTION: A method for making stamps with changed pattern and size by using another stamp is as follows. An inorganic material resin(20) including metal-organic precursor is coated in a substrate(10) for a stamp. A first stamp(30) having patterns(31) is prepared. The inorganic material resin is pressurized with the first stamp. The irradiation of ultraviolet rays at same time with heating is performed at the same time of a pressurized inorganic material resin heating time and an ultraviolet irradiating time. A hardened metal oxide thin film pattern(21) is formed. The first stamp is removed from a metal oxide thin film pattern.