| 摘要 |
PURPOSE: A laser processing device and a method thereof are provided to control a position of a thickness direction of a light focusing point by changing an incidence angle of light of a condensing lens without moving the condensing lens. CONSTITUTION: A laser processing device comprises a laser generator(110), a condensing lens(130), and a zoom lens unit(400). The laser generator irradiates a laser beam. The condensing lens condenses the laser beam to the inside of a processed object, and includes a fixed position. The zoom lens unit changes inclination of the laser beam on an optical axis of the condensing lens by being located between the laser generator and the condensing lends and changes a position of a light focusing point. The zoom lends unit changes the laser beam into parallel light, minute convergence light, or minute emitted light according to the optical axis of the condensing lends. The zoom lends unit comprises a zoom lends moving along the optical axis and including minus power and a fixing lends which irradiates the parallel light, the minute convergence light, and the minute emitted light to the condensing lends according to the position of a moving lends and is located between the zoom lends and the condensing lends. [Reference numerals] (110) Laser generator; (130) Condensing lens; (400,400a) Zoom lens unit |
