| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress metallic ion from being discharged during a cleaning process in a cleaning brush, and to firmly fix brush bundles to the brush body. <P>SOLUTION: The cleaning brush 1 cleans a semiconductor component or the like, and includes: the brush body 2; brush bundles 3; and an embedding member 4. Two or more holes for planting bristles 2a are formed on the surface of the brush body 2. The brush bundle 3 is made of a plurality of brush bristles attached to the plurality of holes for planting bristles 2a of the brush body 2, respectively. The embedding part 4 is made of metal materials whose outer circumferential surface is covered with resin, and is pressed into the holes for planting bristles 2a of the brush body 2 to fix the brush bundles 3 into the holes for planting bristles 2a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
