发明名称 |
CMOS STRUCTURE HAVING MULTIPLE THRESHOLD VOLTAGE DEVICES |
摘要 |
A complementary metal oxide semiconductor (CMOS) structure having multiple threshold voltage devices includes a first transistor device and a second transistor device formed on a semiconductor substrate. A set of vertical oxide spacers selectively formed for the first transistor device are in direct contact with a gate dielectric layer of the first transistor device such that the first transistor device has a shifted threshold voltage with respect to the second transistor device.
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申请公布号 |
US2013062704(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201213472680 |
申请日期 |
2012.05.16 |
申请人 |
CHENG KANGGUO;DORIS BRUCE B.;KHAKIFIROOZ ALI;KULKARNI PRANITA;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHENG KANGGUO;DORIS BRUCE B.;KHAKIFIROOZ ALI;KULKARNI PRANITA |
分类号 |
H01L27/092 |
主分类号 |
H01L27/092 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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