| 摘要 |
PURPOSE: A boat for supporting a substrate, a supporting unit including the same, and an apparatus for processing the substrate using the supporting unit are provided to improve product reliability by supporting an entire surface of a substrate when the substrate is processed. CONSTITUTION: A pair of outer main bars(141) is arranged while having a mutual interval. A pair of outer support bars is formed into a diameter smaller than that of the outer main bar and is combined to the outer main bar while being respectively laminated. A plurality of main connection bars(145) interconnects the pair of outer main bars. A plurality of support pins(145a) is formed in the main connection bar and supports the substrate. |
