| 摘要 |
PURPOSE: A device for detecting residual metal layer material is provided to simplify the structure of an optical system for using the property of a laser beam and to promptly and easily judge the quality of goods. CONSTITUTION: A device for detecting residual metal layer material comprises a light source, an inspection table(107), an image converter(105), and an optical system(103). The light source generates a laser beam. The inspection table is positioned in the bottom of the light source and is detachably mounted on the surface of an inspection substrate(131). The image convertor is positioned in the side of the light source and converts the laser beam which is reflected from the inspection table into an image. The optical system irradiates the laser beam which is emitted from the light source to the inspection table. The laser beam which is reflected in the inspection table is irradiated to the image convertor.
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