| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flowmeter capable of detecting accurately the flow rate of fluid to be measured even in a wide flow rate range without being large-sized. Ž<P>SOLUTION: This thermal flowmeter 1 equipped with a bypass channel B to a sensor channel S other than the sensor channel S wherein resisters R1, R2 for measuring the flow rate are installed, is provided with an inflow channel 43 for communicating an inflow port 42 with the bypass channel B, an outflow channel 45 for communicating an outflow port 46 with the bypass channel B, a communication channel C for communicating the inflow channel 43 with the outflow channel 44 without the aid of the sensor channel S and the bypass channel B, and a CPU substrate 63 for calculating the flow rate of the fluid to be measured based on output signals from the resisters R1, R2. Ž<P>COPYRIGHT: (C)2009,JPO&INPIT Ž</p> |
