| 摘要 |
Soxhlet-type process provides for the removal of substances which dissolve in organic solvents, such as fats, lacquers, and waxes, from the surfaces of objects, partic. those used as semiconductor structural elements. The solvents being purified by distillation and then reintroduced into the process. The distillation and purification plant consists of four parts and incorporates a storage tank which is supplied with condensed solvent from the distillation vessel connected with the purification vessel. An automatic valve is provided between the storage tank and the purification vessel. |
