METHODS OF PREPARING TITANIUM CONTAINING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TITANIUM-BASED PRECURSORS,申请号EP20080799400-传众专利搜索

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发明名称	METHODS OF PREPARING TITANIUM CONTAINING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TITANIUM-BASED PRECURSORS
摘要
申请公布号	EP2201149(B1)	申请公布日期	2013.03.13
申请号	EP20080799400	申请日期	2008.09.10
申请人	SIGMA-ALDRICH CO.	发明人	HEYS, PETER, NICHOLAS;KINGSLEY, ANDREW;SONG, FUQUAN;WILLIAMS, PAUL;LEESE, THOMAS;DAVIES, HYWEL, OWEN;ODEDRA, RAJESH
分类号	C23C16/455	主分类号	C23C16/455
代理机构		代理人
主权项
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