摘要 |
<p>A fluid control device (101) includes a vibrating plate unit (160), a driver (142), and a flexible plate (151). The vibrating plate unit (16) includes a vibrating plate (141) including a first main surface and a second main surface, and a frame plate (161) surrounding the surroundings of the vibrating plate (141). The driver (142) is provided on the first main surface of the vibrating plate (141), and vibrates the vibrating plate. The flexible plate (151) has a hole (152) formed thereon. Furthermore, the flexible plate (151) faces the second main surface of the vibrating plate (141), and adheres to the frame plate by the adhesive agent (120) that contains a plurality of particles (121) arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.</p> |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
HIRATA, ATSUHIKO;ANDO, YOSHINORI;MAEDA, TAKENOBU;KODAMA, YUKIHARU;OMORI, KENTA;MAKINO, SHO |