发明名称 Fluid control device
摘要 <p>A fluid control device (101) includes a vibrating plate unit (160), a driver (142), and a flexible plate (151). The vibrating plate unit (16) includes a vibrating plate (141) including a first main surface and a second main surface, and a frame plate (161) surrounding the surroundings of the vibrating plate (141). The driver (142) is provided on the first main surface of the vibrating plate (141), and vibrates the vibrating plate. The flexible plate (151) has a hole (152) formed thereon. Furthermore, the flexible plate (151) faces the second main surface of the vibrating plate (141), and adheres to the frame plate by the adhesive agent (120) that contains a plurality of particles (121) arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.</p>
申请公布号 EP2568175(A1) 申请公布日期 2013.03.13
申请号 EP20120183352 申请日期 2012.09.06
申请人 MURATA MANUFACTURING CO., LTD. 发明人 HIRATA, ATSUHIKO;ANDO, YOSHINORI;MAEDA, TAKENOBU;KODAMA, YUKIHARU;OMORI, KENTA;MAKINO, SHO
分类号 F04B43/04;F04B45/047 主分类号 F04B43/04
代理机构 代理人
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