发明名称 METHOD OF MANUFACTURING AN ALLOYED SEMICONDUCTIVE DIODE
摘要 1,219,189. Semi-conductor diodes. TRW SEMICONDUCTORS Inc. 29 March, 1968 [16 May, 1967], No. 15339/68. Heading H1K. A low voltage avalanche diode exhibiting reduced dynamic resistance and leakage current is made by forming an alloyed junction and then heating the junction to above 900‹ C. and then cooling at a rate of at least 200‹ C./minute to below the eutectic temperature. In the embodiment aluminium in the form of a ball, wire or piece of foil is placed on an N-type silicon wafer, heated rapidly to above the aluminiumsilicon eutectic temperature but below 900‹ C. and then cooled to below the eutectic at not more than 25‹ C. per minute. After further cooling to room temperature and removal of excess alloy the wafer is reheated at more than 50‹ C./minute to above 900‹ C. and then cooled at a rate of at least 200‹ C. per minute to below the eutectic temperature. The device is then completed and encapsulated in conventional manner.
申请公布号 GB1219189(A) 申请公布日期 1971.01.13
申请号 GB19680015339 申请日期 1968.03.29
申请人 TRW SEMICONDUCTORS INC. 发明人
分类号 H01L21/00;H01L21/324;H01L29/00;H01L29/861 主分类号 H01L21/00
代理机构 代理人
主权项
地址