STAGE HEATER AND METHOD FOR PRODUCING SHAFT

摘要

There is provided a stage heater and a method of manufacturing a shaft capable of suppressing heat transfer from a heating substrate toward the shaft. The stage heater includes: a heating substrate 2 made of aluminum or an alloy containing aluminum; and a shaft 5 that is bonded to one surface of the heating substrate and supports the heating substrate. The shaft 5 includes: a pipe 6 made of a metal having a lower heat conductivity than a material of the heating substrate; and a bonding layer 7 formed on a side of the pipe to be bonded to the heating substrate by accelerating a powder material of aluminum or a powder material of an alloy containing aluminum together with a gas and blowing the powder material while being maintained in a solid phase to the pipe so as to deposit thereon.