发明名称 |
Polishing pad and system with window support |
摘要 |
A polishing system includes a polishing pad having a solid light-transmissive window, an optical fiber having an end, and a spacer having a vertical aperture therethrough. A bottom surface of the spacer contacts the end of the optical fiber, a top surface of the spacer contacts the underside of the window, and the vertical aperture is aligned with the optical fiber. |
申请公布号 |
US8393933(B2) |
申请公布日期 |
2013.03.12 |
申请号 |
US20090644972 |
申请日期 |
2009.12.22 |
申请人 |
QIAN JUN;BENVEGNU DOMINIC J.;CUI NINGZHUO;SWEDEK BOGUSLAW A.;OSTERHELD THOMAS H.;APPLIED MATERIALS, INC. |
发明人 |
QIAN JUN;BENVEGNU DOMINIC J.;CUI NINGZHUO;SWEDEK BOGUSLAW A.;OSTERHELD THOMAS H. |
分类号 |
B24B49/00 |
主分类号 |
B24B49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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