发明名称 NAND flash memory array with cut-off gate line and methods for operating and fabricating the same
摘要 A NAND flash memory array, an operating method and a fabricating method of the same are provided. The NAND flash memory array has a cut-off gate line under a control gate in order to operate two cells having vertical channels independently with one control gate (i.e., a shared word line). The memory cell area is reduced considerably compared to the conventional vertical channel structure, and is better for high integration. A shared cut-off gate turn off is made during a programming operation and prevents programming the opposite cell by a self-boosting effect. It is possible to shield electrically with a shared word line (a control gate) during a reading operation, and minimizes the effect of storage condition of the opposite cell. Also, the NAND flash memory array can be fabricated by using the conventional CMOS process.
申请公布号 US8394698(B2) 申请公布日期 2013.03.12
申请号 US201113170533 申请日期 2011.06.28
申请人 PARK BYUNG-GOOK;CHO SEONG JAE;SEOUL NATIONAL UNIVERSITY INDUSTRY FOUNDATION 发明人 PARK BYUNG-GOOK;CHO SEONG JAE
分类号 H01L21/336;H01L21/8234 主分类号 H01L21/336
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