发明名称 |
Method for forming diamond-like carbon film |
摘要 |
Provided is a method for forming a diamond-like carbon (DLC) film capable of enhancing the adhesion strength of a diamond-like carbon (DLC) film by simple steps. A surface of a substrate 11 made of polytetrafluoroethylene (PTFE) is modified by plasma radiation, and a diamond-like carbon film 12 is formed on the modified PTFE substrate 11 surface by chemical vapor deposition. |
申请公布号 |
US8394455(B2) |
申请公布日期 |
2013.03.12 |
申请号 |
US20080175128 |
申请日期 |
2008.07.17 |
申请人 |
HIRAKURI KENJI;OZEKI KAZUHIDE;TOKYO DENKI UNIVERSITY |
发明人 |
HIRAKURI KENJI;OZEKI KAZUHIDE |
分类号 |
C23C16/00;H05H1/24 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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