SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM

摘要

PURPOSE: A substrate processing apparatus, a substrate processing method and a storage medium are provided to improve the process efficiency for substrates by using only the normal nozzle for a liquid process. CONSTITUTION: A liquid process unit(2) includes nozzles and a liquid process module(20). A transfer unit(4) moves a substrate to a process block. A monitoring unit detects the discharging state of the nozzles. A control unit selects normal nozzles among the nozzles to perform a liquid process on the substrate. [Reference numerals] (2) Liquid process module; (3) Inspection module; (A2) Liquid process unit; (C1) Carrier block; (C2) Process block; (C3) Interface block; (C4) Exposing block; (C5) Inspection block