发明名称 Display device
摘要 At least two TFTs which are connected with a light emitting element are provided, crystallinities of semiconductor regions composing active layers of the respective TFTs are made different from each other. As the semiconductor region, a region obtained by crystallizing an amorphous semiconductor film by laser annealing is applied. In order to change the crystallinity, a method of changing a scan direction of a continuous oscillating laser beam so that crystal growth directions are made different from each other is applied. Alternatively, a method of changing a channel length direction of TFT between the respective semiconductor regions without changing the scan direction of the continuous oscillating laser beam so that a crystal growth direction and a current flowing direction are different from each other is applied.
申请公布号 US8395161(B2) 申请公布日期 2013.03.12
申请号 US201213492970 申请日期 2012.06.11
申请人 YAMAZAKI SHUNPEI;ARAI YASUYUKI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;ARAI YASUYUKI
分类号 H01L29/04;H01L51/50;G09F9/00;G09F9/30;G09G3/32;H01L21/20;H01L21/268;H01L21/336;H01L21/77;H01L21/84;H01L27/08;H01L27/108;H01L27/12;H01L27/32;H01L29/786;H01L31/036 主分类号 H01L29/04
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