发明名称 |
Molding windows in thin pads |
摘要 |
A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer. |
申请公布号 |
US8393940(B2) |
申请公布日期 |
2013.03.12 |
申请号 |
US20100762175 |
申请日期 |
2010.04.16 |
申请人 |
SWEDEK BOGUSLAW A;BENNETT DOYLE E;BENVEGNU DOMINIC J;APPLIED MATERIALS, INC. |
发明人 |
SWEDEK BOGUSLAW A;BENNETT DOYLE E;BENVEGNU DOMINIC J |
分类号 |
B24D11/00 |
主分类号 |
B24D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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