发明名称 Grounded seal ring structure in semiconductor devices
摘要 A semiconductor device includes a substrate having a seal ring region and a circuit region, at least one corner bump disposed in the circuit region, a seal ring structure disposed in the seal ring region, and a connector electrically coupling a metal layer of the seal ring structure to the at least one corner bump. The at least one corner bump is configured to be coupled to a signal ground. A method of fabricating a semiconductor device includes providing a substrate having a seal ring region and a circuit region, providing at least one corner bump in a triangular corner bump zone in the circuit region, providing a seal ring structure in the seal ring region, electrically coupling a metal layer of the seal ring structure to the at least one corner bump, and electrically coupling the at least one corner bump to a signal ground.
申请公布号 US8395239(B2) 申请公布日期 2013.03.12
申请号 US20100915170 申请日期 2010.10.29
申请人 CHEN HSIEN-WEI;YANG CHUNG-YING;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHEN HSIEN-WEI;YANG CHUNG-YING
分类号 H01L29/06;H01L21/00 主分类号 H01L29/06
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