发明名称 |
Metrology probe and method of configuring a metrology probe |
摘要 |
A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.
|
申请公布号 |
US8397311(B2) |
申请公布日期 |
2013.03.12 |
申请号 |
US201013322568 |
申请日期 |
2010.05.28 |
申请人 |
CHOPRA HARSH DEEP;ARMSTRONG JASON N.;HUA ZONGLU;THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK |
发明人 |
CHOPRA HARSH DEEP;ARMSTRONG JASON N.;HUA ZONGLU |
分类号 |
G01Q10/02;G01N23/00;G01Q10/04 |
主分类号 |
G01Q10/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|