| 发明名称 |
Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles |
| 摘要 |
Disclosed are methods of forming multi-doped junctions, which utilize a nanoparticle ink to form an ink pattern on a surface of a substrate. From the ink pattern, a densified film ink pattern can be formed. The disclosed methods may allow in situ controlling of dopant diffusion profiles.
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| 申请公布号 |
US8394658(B2) |
申请公布日期 |
2013.03.12 |
| 申请号 |
US201113238252 |
申请日期 |
2011.09.21 |
| 申请人 |
SCARDERA GIUSEPPE;POPLAVSKYY DMITRY;BURROWS MICHAEL;SHAH SUNIL;INNOVALIGHT, INC. |
发明人 |
SCARDERA GIUSEPPE;POPLAVSKYY DMITRY;BURROWS MICHAEL;SHAH SUNIL |
| 分类号 |
H01L21/22 |
主分类号 |
H01L21/22 |
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