| 摘要 |
PURPOSE: An online acid liquid analyzing method using a near infrared ray-titration method is provided to accurately measure hydrofluoric acid, sulfuric acid, iron, and hydrogen peroxide of mixed acid solution online in which non-nitric acid cleaning operation with respect to stainless steel. CONSTITUTION: An online acid liquid analyzing method using a near infrared ray-titration method is as follows. Concentrations of sulfuric acid, hydrofluoric acid, and iron are used for measuring near infrared ray absorption spectra of the sulfuric acid, hydrofluoric acid, and iron of mixed acid solution. The measured near infrared ray absorption spectra are compared with the near infrared ray absorption spectra according to concentrations per each component set in advance so that the concentration of the components are analyzed. A concentration of hydrogen peroxide is used for measuring an oxidation reduction potential by adding titration solution to the mixed acid solution. The concentration of the hydrogen peroxide is analyzed by comparing an oxidation reduction potential according to the measured concentration of the hydrogen peroxide with the measured an oxidation reduction potential. |
