| 摘要 |
PURPOSE: A MEMS(Micro Electro Mechanical System) microphone having a protection screen of an embedded type textile material is provided to improve MEMS sound efficiency, thereby protecting a MEMS from an elementary particle and a water drop. CONSTITUTION: A protective screen(4) is connected to a main body(2) of a MEMS. The protective screen is comprised as an integrated type of a component for the main body. A microphone and a related screen are processed as an independent element. An opening(3) is separated from a coupling pin(6) for a PCB(Printed Circuit Board)(7). The protective screen is constructed of an advanced polymer having a resistivity property.
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