发明名称 METHODS OF MEASURING HEIGHT VARIATIONS AND SURFACE FEATURES OF A TEST SURFACE AND COMPARING THE SURFACE FEATURES OF THE TEST SURFACE TO A REFERENCE SURFACE
摘要 A frequency-shifting interferometer gathers intensity data from a set of interference patterns produced at different measuring beam frequencies. A periodic function is matched to the intensity data gathered from the set of interference patterns over a corresponding range of measuring beam frequencies. Localized correlations involving phase offsets between the interfering portions of the measuring beam are used to inform a determination of a rate of phase change with measuring beam frequency corresponding to the optical path length difference between the interfering beam portions.
申请公布号 KR101242789(B1) 申请公布日期 2013.03.12
申请号 KR20077009117 申请日期 2005.09.20
申请人 发明人
分类号 G01R23/00;G01R23/12 主分类号 G01R23/00
代理机构 代理人
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