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发明名称
堆叠半导体晶片之方法与装置
摘要
一种半导体系统(100),其包括一晶片(101)及一工件(102),该晶片具有定位在接触垫(120)及个别边缘(110)间之金属填充通孔(140)。此外,防止微裂之密封件(150)及热机械应力之密封件(151)系位于通孔及主动组件间,且有时亦在该等通孔及个别最接近边缘间。工件可为另一半导体晶片或一基板;其具有匹配该等通孔的位置之接触垫(170)。该晶片系在该工件上垂直地堆叠,以使各接触垫对齐且与对应通孔电接触。
申请公布号
TWI389183
申请公布日期
2013.03.11
申请号
TW097137392
申请日期
2008.09.26
申请人
德州仪器公司 美国
发明人
马克A 格伯
分类号
H01L21/28;H01L23/48;H01L25/00
主分类号
H01L21/28
代理机构
代理人
蔡瑞森 台北市松山区敦化北路201号7楼
主权项
地址
美国
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