| 摘要 |
PURPOSE: A non-vibration linear stage is provided to prevent vibration generated during the operation by forming a pair of stators, a dummy weight connecting the pair of stators, and an elastic unit. CONSTITUTION: A non-vibration linear stage(100) comprises a base(10), a pair of stators(31), a pair of movers(32), an elastic unit, a dummy weight(50), and a brake member(70). The pair of movers is reciprocated by electric power generated by the interaction of the movers and the stators. The elastic unit applies elastic force to the stators. The dummy weight connects the stators. The brake member generates electromagnetic force to block the reciprocation of the stators. |
