MULTI-FIN DEVICE AND METHOD OF MAKING SAME

摘要

PURPOSE: A multi-fin device and a manufacturing method thereof are provided to finely control a channel width by controlling a thickness of an insulation layer. CONSTITUTION: A multi-fin device includes a substrate(4) and a plurality of fins formed on the substrate. A source region and a drain region are formed in each fin. The insulation layer is formed on the substrate and includes a first thickness near a first surface of a first fin and a second thickness near an opposite side to the fin. The first thickness is different from the second thickness. A continuous gate structure(14) is formed by overlaying the plurality of fins and is adjacent to one sidewall of the fin and the upper surface of each fin.