发明名称 BOTTLE
摘要 <p>PURPOSE: A bottle is provided to reduce chemical consumption by minimizing the chemical remaining in the bottle when the bottle is replaced. CONSTITUTION: The chemical is filled in a container(462) and an opening is formed on the upper side of the container. A cap(464) opens and closes the opening. A gas tube(472) supplies gas to the container. The end of a chemical tube(470) is located near or in the bottom of the container. The cap includes a first body(466) and a second body(468). The first body is combined with the container and includes a hole to face the opening. The second body is inserted into the hole. The chemical tube passes through the second body and is fixed to the second body.</p>
申请公布号 KR20130025130(A) 申请公布日期 2013.03.11
申请号 KR20110088482 申请日期 2011.09.01
申请人 SEMES CO., LTD. 发明人 CHOI, YOUNG;KIM, DAE HWAN
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址