发明名称 TRICHLOROSILANE PRODUCTION PLANT AND METHOD OF TRICHLOROSILANE PRODUCTION
摘要 FIELD: process engineering.SUBSTANCE: proposed plant comprises reactor, raw stock feed device to feed metal silicon into reactor, gas feed device to force hydrogen chloride into reactor to make it react with metal silicon powder and to be fluidised by said hydrogen chloride gas, gas removal device to release generated gas bearing trichlorosilane from reactor top section, multiple heat transfer pipes spaced apart in annular space nearby reactor peripheral wall, and multiple gas flow control elements arranged in central space surrounded by heat transfer tubes in vertical direction. Note here that every said gas flow control element is stopped on both ends.EFFECT: higher-efficiency reaction.5 cl, 7 dwg
申请公布号 RU2477171(C2) 申请公布日期 2013.03.10
申请号 RU20080141675 申请日期 2008.10.20
申请人 MITSUBISI MATIRIALZ KORPOREJSHN 发明人 INABA TIKARA
分类号 B01J8/18;C01B33/107 主分类号 B01J8/18
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