| 摘要 |
PURPOSE: A voice coil actuator with a structure of a leaf spring guide, an active anti-vibration table using the same and an active anti-vibration system are provided to prevent the damage to a coil and a yoke since the vertical movement of a driving shaft is allowed and its horizontal movement is restricted so that a coil does not make contact with the yoke. CONSTITUTION: A voice coil actuator comprises a permanent magnet(710), a coil(720), a yoke(730), and a leaf spring(740). The permanent magnet forms magnetic field. The coil is installed to surround the permanent magnet to generate Lorentz force. Current flows on the coil along the magnetic filed on the permanent magnet. The yoke holds the permanent magnet and the coil, is magnetized by the magnetic flux from the permanent magnet and drives an active anti-vibration system. The leaf spring is vertically coupled to the coil and the yoke and elastically supports them when the anti-vibration table rotates. The leaf spring restricts the rotation of the coil to the yoke in a state of maintaining a gap between the coil and the yoke. |
