APPARATUS FOR TREATING HAZARDOUS GAS INTEGRATED PLASMA AND SCRUBBER

摘要

PURPOSE: A noxious gas processing device comprising a scrubber device and a vertical plasma device is provided to save a cleaning solution by forming a water-film, and supplying the cleaning solution to a scrubber filled with packing balls. CONSTITUTION: A noxious gas processing device comprising a scrubber device and a vertical plasma device comprises a plasma device part(2) and a scrubber device part(3). The plasma device part is vertically installed with an implanter pole(22) generating plasma, and an earth bar(21), and is able to move from the upper side to the lower side. The scrubber device part is installed in the vertically lower part of the plasma device part. The cleaning solution used for the scrubber device part is supplied to the implanter pole of the plasma device part, forms a water-film, and is supplied to packing balls(31a) in the scrubber device part. [Reference numerals] (AA) Noxious gas; (BB,CC) Cleaning solution; (DD) Ground