| 摘要 |
PURPOSE: A reaction vessel is provided to reduce reactivity of SiO gas and graphite powder and the generation of SiC. CONSTITUTION: A method for manufacturing a reaction vessel comprises: a step of pressing graphite powder and preparing a molding product(ST10); and a step of processing the molding product(ST20). The particle size of the graphite powder is 10-100 um. A vacuum thermal treatment device comprises a chamber, the reaction vessel, and a heating member. The reaction vessel is placed in the chamber. |
