发明名称 FLEXIBLE CUPPER CLAD LAMINATED FILM FOR SEMI-ADDITIVE AND MANUFACTURING METHOD THE SAME
摘要 PURPOSE: A semi additive flexible copper foil laminated film using the size of a plating particle and the etching ability and a manufacturing method thereof are provided to properly control the size of a plating particle to prevent the undercut caused by the high speed of etching. CONSTITUTION: A polyimide film is treated by plasma. The surface cleaning and the surface roughness are improved. Ni-Cr of a tie layer carrying out a role as a conductor layer and Cu on a seed layer are deposited through a sputtering method of the PVD(physical vapor deposition) method. The Cu layer is plated in the copper sulfate solution by the use of the electrolytic plating method. Cu is electrically plated through several steps based on the is the electric current density.
申请公布号 KR20130023519(A) 申请公布日期 2013.03.08
申请号 KR20110086337 申请日期 2011.08.29
申请人 TORAY ADVANCED MATERIALS KOREA INC. 发明人 JEON, EUN WOOK;KIM, YOUNG SUB;JEON, HAE SANG;LEE, YONG HO
分类号 H05K3/06;B32B27/34;H05K3/38 主分类号 H05K3/06
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