| 摘要 |
PURPOSE: An apparatus and a method for depositing a thin film are provided to uniformly transfer heat generated from a heater through multiple porous plates to not only the outer peripheral portion but also the central portion of a solid organic matter, and to improve deposition uniformity. CONSTITUTION: An apparatus for depositing a thin film comprises a body, a heater, and multiple porous plates(122). Solid organic matters are housed in the body. The heater, which is formed on the outer wall of the body, transfers heat to the organic matters. The porous plates are alternatively deposited with the organic matters inside the body, and descend to the bottom surface of the body depending on the evaporation of the organic matters. A supporting part is formed in between the lowest porous plate, placed on the lowest portion among the porous plates, and the porous plate on the lowest porous plate. The porous plates descend depending on the evaporation of the organic matters, and are respectively coupled to the adjacent porous plates through coupling parts. The coupling part of the highest porous plate, placed on the highest portion among the porous plates, is formed into a protrusion, and the coupling parts of the other porous plates are formed into grooves.
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