ROLL TO ROLL APPARATURS FOR MANUFACTURING THIN FILM

摘要

PURPOSE: A roll to roll apparatus for fabricating a thin film is provided to prevent recontamination of a roll substrate by using a roll cartridge. CONSTITUTION: A pre-processing chamber(150) is used to process a roll substrate(100). A thin film is formed on a pre-processed roll substrate in a thin film fabrication chamber(160). A roll cartridge(110-130) is attached and detached to/from the pre-processing chamber and the thin film fabrication chamber. The roll cartridge transfers the roll substrate to the pre-processing chamber in a vacuum.