ULTRASONIC BONDING APPARATUS HAVING CHANGEABLE PRESSURE PART

摘要

PURPOSE: An ultrasonic bonding device equipped with a replacement type pressurization member is provided to replace a pressurization member based on the shape of the contact plane of bonded object or the overall shape of the bonded object, thereby improving the transmission efficiency of the vibration energy of an ultrasonic horn. CONSTITUTION: A jig base(10) is provided to be vertically movable. The jig base pressurizes the circuit chip of a printed circuit board located on a stage(100). The pressurization member(20) comprises a pressurization plane(20a) pressurizing the circuit chip. An elastic member(30) is combined between the jig base and the pressurization member and provides the elastic force between the pressurization member and the jig base. An ultrasonic horn(40) is combined to the pressurization member in order to deliver vibration through the pressurization plane of the pressurization member to the connected object.