REMOTE PLASMA DEVICE FOR THE IMPROVEMENT OF VACUUM PUMP LIFETIME

摘要

PURPOSE: A remote plasma reactor is provided to improve the performance of a vacuum pump by using a plasma jet for removing particles in a vacuum chamber. CONSTITUTION: A plasma reaction pipe(31) has a plasma space. The plasma space is connected to the internal space of a vacuum pump(20). The plasma reaction pipe supplies the plasma generated in the plasma reaction pipe into the vacuum pump. A gas supply pipe(34) supplies cleaning gas into the plasma reaction pipe. The cleaning gas includes CF4, C2F6, NF3, SF6, O2, or H2. [Reference numerals] (AA) Cleaning gas