A CYLINDER CATHODE OF SPUTTERING

摘要

PURPOSE: A sputtering cylinder cathode is provided to increase cooling efficiency on the inflow rate of cooling water by increasing contact time and contact area between the cooling water and the interior of a body. CONSTITUTION: A sputtering cylinder cathode has a cylindrical body(6). A cooling pipe(4) for receiving cooling water from the outside is fixed inside the cylindrical body not to be rotated. The body rotates, and a drain pipe(5) is arranged in one end of the body. A cooling water drain part is positioned in one end of the cooling pipe. The cooling pipe has multiple drain holes(7) to spray cooling water as a vortex shape when the cooling water is drained.