MTJ THREE-AXIS MAGNETIC FIELD SENSOR AND ENCAPSULATION METHOD THEREOF

摘要

Disclosed is an MTJ three-axis magnetic field sensor, which comprises: an X axis bridge magnetic field sensor (25) with the sensitive direction being the X axis, a Y axis bridge magnetic field sensor (26) with the sensitive direction being the Y axis, a Z axis magnetic field sensor (27) with the sensitive direction being the Z axis, an ASIC chip (19) connected to and adapted to the X axis bridge magnetic field sensor (25), the Y axis bridge magnetic field sensor (26), and the Z axis magnetic field sensor (27). The Z axis magnetic field sensor (27) comprises a sheet (18) and an MTJ component (1) fabricated on the sheet (18), the Z axis magnetic field sensor (27) is attached over the ASIC chip (19) to form an attachment edge (21), and an included angle is formed between the side of the Z axis magnetic field sensor (27) adjacent to the attachment edge (21) and the attachment edge (21), the included angle is an acute angle or an obtuse angle, in which the X axis, the Y axis, and the Z axis are orthogonal two by two. The present invention adopts the foregoing structure to achieve higher integrity, higher sensitivity, lower power consumption, better linearity, wider dynamic range, better temperature characteristic, and higher anti-interference capability.