| 摘要 |
<p>A piezoelectric bulk wave vibration device that uses a thickness-shear vibration mode for LiTaO3, and whereby a filter or resonator capable of having a higher frequency can be formed using a thick LiTaO3 thin plate. The piezoelectric bulk wave device (1): comprises a piezoelectric thin plate (5) comprising LiTaO3, and first and second electrodes (6, 7) disposed so as to come in contact with the piezoelectric thin plate (5); and uses thickness-shear vibration mode bulk waves from the piezoelectric thin plate (5) comprising LiTaO3. The first and second electrodes (6, 7) comprise a conductor having a smaller specific acoustic impedance than the specific acoustic impedance of transverse waves that propagate LiTaO3. The piezoelectric bulk wave device (1) has an electrode thickness/(LT thickness + electrode thickness) of 5%-70%, which is the ratio between the electrode thickness, being the total thickness of the first and second electrodes (6, 7), and the sum of the LiTaO3 and the electrode thicknesses.</p> |
