发明名称 |
RELEASE ACTIVATED THIN FILM GETTER |
摘要 |
<p>This disclosure provides apparatuses, systems and methods for manufacturing electromechanical systems (EMS) devices having a means for removing and/or mitigating unwanted environmental stresses from within the device. In some implementations, an integrated getter layer that is exposed to an internal cavity of the electromechanical systems device can be configured to help remove and/or mitigate unwanted moisture from within an EMS device.</p> |
申请公布号 |
WO2013032781(A1) |
申请公布日期 |
2013.03.07 |
申请号 |
WO2012US51726 |
申请日期 |
2012.08.21 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.;LASITER, JON, B. |
发明人 |
LASITER, JON, B. |
分类号 |
B81B7/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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