METHODS OF MANUFACTURING SENSORS HAVING MESOPOROUS FILM AND SENSOR MANUFACTURED BY THE SAME
摘要
PURPOSE: A method for sensor including a porous membrane and a sensor manufactured by the same are provided to regulate the thickness and the porosity of the membrane, thereby controlling the sensitivity of the sensor with easily method. CONSTITUTION: A method for sensor including a porous membrane comprises; a step for forming the porous membrane by depositing two or more elements; and a step for manufacturing the porous membrane by selectively removing the elements from the membrane.
申请公布号
KR20130023010(A)
申请公布日期
2013.03.07
申请号
KR20110112252
申请日期
2011.10.31
申请人
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
KIM, SANG HOON;BYUN, JI YOUNG;HA, HEON PHIL;LIM, CHAE SUN;KIM, DO HYUNG