发明名称 METHOD FOR OPERATING A LASER SCANNER AND PROCESSING SYSTEM WITH LASER SCANNER
摘要 A method includes using a scanner to scan a laser beam along a scan path, and detecting light intensities caused by laser light of the laser beam incident on a detection cross-section. The method also includes determining a position of the detection cross-section relative to the laser scanner based on the detected light intensities. The scan path includes, in a plane which includes the detection cross-section, a first partial path and a second partial path which extend adjacent to each other and at a distance from each other which is: a) smaller than a diameter of the detection cross-section plus a diameter of the laser beam in the plane which includes the detection cross-section; and b) greater than 0.3 times the diameter of the laser beam in the plane which includes the detection cross-section or greater than 0.3 times the diameter of the detection cross-section.
申请公布号 US2013057874(A1) 申请公布日期 2013.03.07
申请号 US201213565147 申请日期 2012.08.02
申请人 DOEMER HOLGER;ROSENKRANZ RUEDIGER;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;CARL-ZEISS MICROSCOPY GMBH 发明人 DOEMER HOLGER;ROSENKRANZ RUEDIGER
分类号 G01B11/14 主分类号 G01B11/14
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