发明名称 |
METHOD FOR OPERATING A LASER SCANNER AND PROCESSING SYSTEM WITH LASER SCANNER |
摘要 |
A method includes using a scanner to scan a laser beam along a scan path, and detecting light intensities caused by laser light of the laser beam incident on a detection cross-section. The method also includes determining a position of the detection cross-section relative to the laser scanner based on the detected light intensities. The scan path includes, in a plane which includes the detection cross-section, a first partial path and a second partial path which extend adjacent to each other and at a distance from each other which is: a) smaller than a diameter of the detection cross-section plus a diameter of the laser beam in the plane which includes the detection cross-section; and b) greater than 0.3 times the diameter of the laser beam in the plane which includes the detection cross-section or greater than 0.3 times the diameter of the detection cross-section. |
申请公布号 |
US2013057874(A1) |
申请公布日期 |
2013.03.07 |
申请号 |
US201213565147 |
申请日期 |
2012.08.02 |
申请人 |
DOEMER HOLGER;ROSENKRANZ RUEDIGER;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;CARL-ZEISS MICROSCOPY GMBH |
发明人 |
DOEMER HOLGER;ROSENKRANZ RUEDIGER |
分类号 |
G01B11/14 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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