| 摘要 |
This microparticle sensor (2) for detecting a quantity of microparticles in a gas to be measured is provided with an insulating body (8), and a pair of electrodes (10, 12) which are disposed at an interval on a main surface (8a) of the insulating body (8). The insulating body (8) has, on a portion where the pair of electrodes (10, 12) are not formed, an insulating portion (8b) having a height equal to or more than that of the pair of electrodes (10, 12), said height being in the direction perpendicular to the main surface (8a). In one method for manufacturing the microparticle sensor, first, an electrode pattern composed of a constituent material of the pair of electrodes (10, 12) is formed on a substrate that constitutes the insulating body (8), and a mask is formed on the electrode pattern, said mask being composed of a material that volatilizes at a temperature equal to or lower than the sintering temperature of the electrode pattern, and having a pattern identical to the electrode pattern. A thin film composed of the constituent material of the insulating portion (8b) is formed on the mask, and the electrodes (10, 12) and the insulating portion (8b) are formed by sintering the electrode pattern and the thin film. |
