| 发明名称 |
COATING STATION |
| 摘要 |
<p>A coating station (10) is disclosed, which comprises at least one coating chamber (15) that can be sealed with respect to the environment and that can be evacuated and/or to which protective gas can be applied, a laser cleaning device (24) being provided for cleaning parts of the coating station (10).</p> |
| 申请公布号 |
WO2013029982(A1) |
申请公布日期 |
2013.03.07 |
| 申请号 |
WO2012EP65851 |
申请日期 |
2012.08.14 |
| 申请人 |
SCHMID VACUUM TECHNOLOGY GMBH;SCHMID, CHRISTIAN;HAUNGS, JUERGEN |
发明人 |
SCHMID, CHRISTIAN;HAUNGS, JUERGEN |
| 分类号 |
C23C14/56;B08B7/00;C23C16/44 |
主分类号 |
C23C14/56 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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