发明名称 |
Pressure Measuring Instrument |
摘要 |
A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection. |
申请公布号 |
US2013055820(A1) |
申请公布日期 |
2013.03.07 |
申请号 |
US201213491842 |
申请日期 |
2012.06.08 |
申请人 |
BOURBEAU KEVIN M.;BEISHLINE ERIC C.;AMIRTO MICHAEL J.;PINTO GINO A.;FONTAINE BENJAMIN F. |
发明人 |
BOURBEAU KEVIN M.;BEISHLINE ERIC C.;AMIRTO MICHAEL J.;PINTO GINO A.;FONTAINE BENJAMIN F. |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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