| 摘要 |
Disclosed is a coaxial probe capable of improved durability and productivity. The disclosed coaxial probe is characterized by comprising: an inner conductor including an upper contact capable of contacting a semiconductor device, a lower contact capable of contacting a tester for testing the semiconductor device, and an inner resilient member for resiliently biasing at least one of the upper contact and the lower contact in order for the upper contact and the lower contact to move away from each other; an outer conductor surrounding the inner conductor; a plurality of gap members inserted into both ends between the inner conductor and the outer conductor such that a fixed air gap exists between the inner conductor and the outer conductor; and at least one outer resilient member inserted over the outer peripheral surface of the outer member so as to resiliently bias at least one of the semiconductor device and the tester in a direction away from the outer conductor. |
