ADHESIVE SHEET FOR IMMOBILIZING IMPRINT MOLD, IMPRINT DEVICE, AND IMPRINT METHOD

摘要

[Problem] To provide an adhesive sheet for immobilizing an imprint mold, which is capable of immobilizing an imprint mold so that the imprint mold is not separated or shifted during imprinting, and which is able to be separated from a pressure application unit of an imprint device when the imprint mold is replaced. [Solution] An adhesive sheet for immobilizing an imprint mold of the present invention is an adhesive sheet which is used for the purpose of integrally immobilizing an imprint mold to a pressure application unit of an imprint device that transfers a fine pattern provided on the imprint mold to a transfer-receiving body by pressing the imprint mold against the transfer-receiving body. This adhesive sheet for immobilizing an imprint mold comprises a base, an adhesive layer (A) that is provided on one surface of the base, and an adhesive layer (B) that is provided on the other surface of the base, and is characterized in that: the adhesive layer (A) is used for the purpose of being bonded to the pressure application unit of the imprint device, and the adhesive layer (B) is used for the purpose of being bonded to the imprint mold; the adhesive power of the adhesive layer (B) at 23°C is higher than the adhesive power of the adhesive layer (A) at 23°C; and the adhesive layer (A) has an adhesive power of 1-10 N/25 mm at 23°C and an adhesive power of 1-30 N/25 mm after being left to stand for 7 hours at 80°C at a humidity of 65%, and the adhesive layer (B) has an adhesive power of 3-30 N/25 mm at 23°C.