| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique in which a coating liquid can be extruded by a high pressure, and that can perform an appropriate discharge control in the pattern formation technique that forms a given pattern by applying a coating liquid to a substrate. <P>SOLUTION: A tip section of a discharge nozzle 31 is shaped like a wedge, and projections 310 which further protrude are formed at the tip of the wedge. Lower surfaces 310b of the projections 310 define a substrate-facing-surface which is brought into proximity to the substrate, and discharge outlet bearing surfaces 310c, which gradually retract back from the substrate W, are formed as if to rise from the edges of the lower surfaces 310b. At adjacent positions within the discharge outlet bearing surface 310c which are adjacent to the substrate-facing-surface 310b, discharge outlets 311 for discharging an application liquid are opened. Areas around the discharge outlets 311 and a wall around a fluid feeding path 312 are integrated with each other. <P>COPYRIGHT: (C)2013,JPO&INPIT |
