发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 According to one embodiment, a semiconductor memory device includes a substrate, a first stacked body, a second stacked body, a memory film, a gate insulating film, and a channel body. The first stacked body has a plurality of electrode layers and a plurality of first insulating layers. The second stacked body has a selector gate and a second insulating layer. The memory film is provided on a sidewall of a first hole. The gate insulating film is provided on a sidewall of a second hole. The channel body is provided on an inner side of the memory film and on an inner side of the gate insulating film. A step part is provided between a side face of the selector gate and the second insulating layer. A region positioned near a top end of the selector gate of the channel body is silicided.
申请公布号 US2013056814(A1) 申请公布日期 2013.03.07
申请号 US201213415057 申请日期 2012.03.08
申请人 HIGUCHI MASAAKI;KABUSHIKI KAISHA TOSHIBA 发明人 HIGUCHI MASAAKI
分类号 H01L29/78 主分类号 H01L29/78
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